Please click here if you would like additional information
Global Customer Support & Service
Oxford Instruments is committed to supporting our customers around the world, with a range of support agreements, service options and training to meet your needs. More >>
Molecular beam epitaxy (MBE)
Proven systems for molecular beam epitaxy (MBE)
Our systems and products for molecular beam epitaxy offer the world-respected MBE technology of VG Semicon with the continued development and worldwide support of Oxford Instruments, proven on advanced device growth such as quantum cascade lasers (QCLs) and blue/violet laser diodes.
MBE products
Select one of our MBE reactor systems or sources from the Product Finder or Related Products sections on the right to learn more:
MBE reactors
V80H
- MBE for research with production-proven technology
V90
- MBE for research, device development and small-scale production
V100
- Fully qualified production MBE
MBE sources
ThermaCell™ effusion sources
- Unrivalled stability and composition control for III-V, II-VI and nitride MBE assured by industry-leading soft-action shutter design and ThermaCell source technology
ECell™As Arsenic cracker source
- The ECellAs valved As effusion source or "cracker cell", designed for high performance MBE growth of Arsenic-containing III-V materials, offers significant benefits over the thermal control of conventional open sources
V90 molecular beam epitaxy (MBE) system
Product finder
NEW - MBE software upgrade for V80H, V90 & V100
Discover enhanced software and hardware functionality for V80H, V90 & V100 MBE systems Click here or in Downloads and Links below
Process News
Read about what's new in etching, deposition and growth More >>
Related Information
Downloads and Links
Related Products
- ECellAs Arsenic cracker source
- FlexAL atomic layer deposition (ALD) tool
- Ionfab®300Plus
- Nanofab
- OpAL atomic layer deposition (ALD) tool
- Plasmalab®800Plus
- Plasmalab®80Plus
- Plasmalab®System100
- Plasmalab®System133
- Plasmalab®System400 magnetron sputter tool
- Plasmalab®µEtch300
- Plasmalab®µEtchEL
- TEOS PECVD module
- V100 molecular beam epitaxy (MBE) systems
- V80H molecular beam epitaxy (MBE) systems
- V90 molecular beam epitaxy (MBE) systems


