Oxford Instruments specialises in the design, manufacture and support of innovative solutions, tools and systems for the emerging nanotechnology markets in areas such as XRF (X-ray Fluorescence) analysers , microanalysis systems, superconducting wires, NMR (nuclear magnetic resonance) magnets, cryogenic systems, plasma etch and deposition low temperature environments and coating thickness measurement.

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Global Customer Support & Service

Global Customer Support & Service - Oxford Instruments Plasma Technology

Global Customer Support & Service - Oxford Instruments Plasma Technology

Oxford Instruments Plasma Technology

Oxford Instruments is committed to supporting our customers around the world. Our plasma, ALD, MBE and ion beam customers do not just buy a product from us, they buy a business solution – and we can provide you with service solutions that enable you to maintain and grow your business, whether you are running a research facility or production plant.

Support agreements and service

  • We are able to provide support agreements around the world that meet your business needs, ranging from telephone support to 24/7 on-site support. Click here for more information

Spare parts

  • Mantain your system and process performance by the use of genuine original Oxford Instruments spares. With spares centres around the world we can provide the parts you need when you need them. Click here for more information

Process support

  • With a global team of process specialists, we can help you maintain your current processes and help develop new processes to meet your business needs

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Upgrades

  • As a result of our policy of continual product development we are able to offer a range of system upgrades that both extend the life of your systems and add new functionality. We are also able to provide system upgrades that change the functionality – for example from one type of process to another. For full details, please contact your local Oxford Instruments sales and customer support office.

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NEW - Plasma Accelerator for FA in advanced die etch processes

NEW - Failure analysis plasma accelerator upgrade for fast RIE and ICP FA de-processing


Up to 20 times faster etching rates with the Failure Analysis Plasma Accelerator upgrade for RIE and ICP FA de-processing Click here or in Downloads and Links below

Related Information

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